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Ammonium fluoride is a critical component of buffered oxide etch (BOE), a wet etchant used in microfabrication. It acts as the buffering agent in a solution of concentrated HF , creating an etchant with a more controllable rate of etching (than that of simple concentrated HF solutions).
Chemical formula Synonyms CAS number C 10 H 16 N 2 O 8: Ethylenediaminetetraacetic acid (EDTA): 6381–92–6 C 12 H 22 O 11: sucrose: 57–50–1 C 18 H 29 O 3 S: sodium dodecyl benzenesulfonate: 2155–30–0
Tetra-n-butylammonium fluoride, commonly abbreviated to TBAF and n-Bu 4 NF, is a quaternary ammonium salt with the chemical formula (CH 3 CH 2 CH 2 CH 2) 4 N + F −. It is commercially available as the white solid trihydrate and as a solution in tetrahydrofuran. TBAF is used as a source of fluoride ion in organic solvents. [1]
Tetramethylammonium fluoride, commonly abbreviated TMAF, is the quaternary ammonium salt with the formula (CH 3) 4 NF. This hygroscopic white solid is a source of “naked fluoride": fluoride ions not complexed with a metal atom. Most other soluble salts of fluoride are in fact bifluorides, HF 2 –.
Ammonium bifluoride, as its name indicates, contains an ammonium cation ([NH 4] +), and a bifluoride (or hydrogen difluoride) anion ([HF 2] −).The triatomic bifluoride anion features a strong three-center four-electron bond (specifically, a symmetrical hydrogen bond) with a bond energy greater than 155 kJ/mol, [2] and an H-F length of 114 pm. [3]
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Ammonium fluorosilicate (also known as ammonium hexafluorosilicate, ammonium fluosilicate or ammonium silicofluoride) has the formula (NH 4) 2 SiF 6. It is a toxic chemical, like all salts of fluorosilicic acid. [4] It is made of white crystals, [5] which have at least three polymorphs [6] and appears in nature as rare minerals cryptohalite or ...
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