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2. Ion milling machine - Wikipedia

   en.wikipedia.org/wiki/Ion_milling_machine

   The ion mill generates high-energy particles to remove material off the surface of a specimen, similar to how sand and dust particles wear away at rocks in a canyon to create a smooth surface. Relative to other techniques, ion milling creates much less surface damage, [ 1 ] which makes it perfect for surface-sensitive analytical techniques.

3. Focused ion beam - Wikipedia

   en.wikipedia.org/wiki/Focused_ion_beam

   Most widespread instruments are using liquid metal ion sources (LMIS), especially gallium ion sources. Ion sources based on elemental gold and iridium are also available. In a gallium LMIS, gallium metal is placed in contact with a tungsten needle, and heated gallium wets the tungsten and flows to the tip of the needle, where the opposing forces of surface tension and electric field form the ...

4. Etching (microfabrication) - Wikipedia

   en.wikipedia.org/wiki/Etching_(microfabrication)

   Ion milling, or sputter etching, uses lower pressures, often as low as 10 −4 Torr (10 mPa). It bombards the wafer with energetic ions of noble gases, often Ar +, which knock atoms from the substrate by transferring momentum. Because the etching is performed by ions, which approach the wafer approximately from one direction, this process is ...

5. Reactive-ion etching - Wikipedia

   en.wikipedia.org/wiki/Reactive-ion_etching

   Reactive-ion etching (RIE) is an etching technology used in microfabrication. RIE is a type of dry etching which has different characteristics than wet etching . RIE uses chemically reactive plasma to remove material deposited on wafers .

6. FEI Company - Wikipedia

   en.wikipedia.org/wiki/FEI_Company

   FEI Company (Field Electron and Ion Company) was an American company that designed, manufactured, and supported microscope technology. Headquartered in Hillsboro, Oregon , FEI had over 2,800 employees and sales and service operations in more than 50 countries around the world.

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8. Ion beam - Wikipedia

   en.wikipedia.org/wiki/Ion_beam

   An ion beam is a beam of ions, a type of charged particle beam. Ion beams have many uses in electronics manufacturing (principally ion implantation) and other industries. There are many ion beam sources, some derived from the mercury vapor thrusters developed by NASA in the 1960s. The most widely used ion beams are of singly-charged ions.

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