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Most turbomolecular pumps employ multiple stages, each consisting of a quickly rotating rotor blade and stationary stator blade pair. The system is an axial compressor that puts energy into the gas, rather than a turbine, which takes energy out of a moving fluid to create rotary power, thus "turbomolecular pump" is a misnomer.
A molecular drag pump is a type of vacuum pump that utilizes the drag of air molecules against a rotating surface. [1] The most common sub-type is the Holweck pump, which contains a rotating cylinder with spiral grooves which direct the gas from the high vacuum side of the pump to the low vacuum side of the pump. [2]
Single-stage vacuum pumps typically produce vacuum to 35 torr (mm Hg) or 47 millibars (4.7 kPa), and two-stage pumps can produce vacuum to 25 torr, assuming air is being pumped and the ring-liquid is water at 15 °C (59 °F) or less. Dry air and 15 °C sealant-water temperature is the standard performance basis, which most manufacturers use for ...
A scroll compressor (also called spiral compressor, scroll pump and scroll vacuum pump) is a device for compressing air or refrigerant. [1] It is used in air conditioning equipment, as an automobile supercharger (where it is known as a scroll-type supercharger ) and as a vacuum pump .
Furthermore, vane pumps can be used in low-pressure gas applications such as secondary air injection for auto exhaust emission control, or in low-pressure chemical vapor deposition systems [citation needed]. Rotary-vane pumps are also a common type of vacuum pump, with two-stage pumps able to reach pressures well below 10 −6 bar.
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