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Single-crystalline SADP automatically interpreted with CrysTBox software. SAD analysis is widely used in material research for its relative simplicity and high information value. Once the sample is prepared and examined in a modern transmission electron microscope, the device allows for a routine diffraction acquisition in a matter of seconds.
Compared to 193i SADP, EUV SADP cost is dominated by the EUV tool exposure, while the 193i SAQP cost difference is from the added depositions and etches. The processing cost and yield loss at a lithographic tool is expected to be highest in the whole integrated process flow due to the need to move the wafer to specific locations at high speed.
SADP may refer to : Science and Technology. Self-Aligned Double-Patterning, a Multiple patterning technique used in semiconductor manufacturing; Selected Area Diffraction Pattern, the pattern of spots in Selected area diffraction; sADP, "slow after depolarizing current", an experimental response of Neurons; Other
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This resolution improvement technique is also known as Self-Aligned Double Patterning (SADP). SADP may be re-applied for even higher resolution, and has already been demonstrated for 15 nm NAND flash memory. [1] Spacer patterning has also been adopted for sub-20 nm logic nodes, e.g., 14 nm and 10 nm. At advanced nodes, spacer-based patterning ...
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