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Chemical vapor deposition (CVD) is a vacuum deposition method used to produce high-quality, and high-performance, solid materials. The process is often used in the semiconductor industry to produce thin films .
In synthetic diamond grown by the high-pressure high-temperature synthesis [5] or chemical vapor deposition, [6] [7] defects with symmetry lower than tetrahedral align to the direction of the growth. Such alignment has also been observed in gallium arsenide [ 8 ] and thus is not unique to diamond.
In chemistry, a precursor is a compound that contributes in a chemical reaction and produces another compound, or a chemical substance that gives rise to another more significant chemical product. Since several years metal-organic compounds are widely used as molecular precursors for the chemical vapor deposition process (MOCVD).
It was a supplier of chemical vapor deposition (CVD), plasma-enhanced chemical vapor deposition (PECVD), physical vapor deposition (PVD), electrochemical deposition (ECD), ultraviolet thermal processing (UVTP), and surface preparation equipment used in the manufacturing of semiconductors.
They include plasma polymer films, amorphous carbon films (diamond-like carbon, DLC), CVD diamond films as well as graphite films. Carbon films are produced by deposition using gas-phase deposition processes, in most cases taking place in a vacuum: chemical vapor deposition, CVD or physical vapor deposition, PVD.
When the vapor source is a liquid or solid, the process is called physical vapor deposition (PVD), [3] which is used in semiconductor devices, thin-film solar panels, and glass coatings. [4] When the source is a chemical vapor precursor, the process is called chemical vapor deposition (CVD).
In 1987, Applied introduced a chemical vapor deposition (CVD) machine called the Precision 5000, which differed from existing machines by incorporating diverse processes into a single machine that had multiple process chambers. [10] In 1992, the corporation settled a lawsuit with three former employees for an estimated $600,000.
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