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The saturation occurs because the tungsten layer stops diffusion of WF 6 molecules to the Si substrate which is the only catalyst of molecular decomposition in this process. [4] If the deposition occurs not in an inert atmosphere but in an oxygen-containing atmosphere (air), then instead of tungsten, a tungsten oxide layer is produced. [17]
Tungsten(VI) oxytetrafluoride can be synthesized by the reaction of fluorine and tungsten trioxide. [4] It can also be obtained by treating tungsten with a mixture of oxygen and fluorine at high temperatures. [1] Partial hydrolysis of tungsten hexafluoride will also produce WOF 4. [9] WF 6 + H 2 O → WOF 4 + 2 HF
Tungsten hexafluoride (tungsten(VI) fluoride) This page was last edited on 18 July 2023, at ...
Tungsten tetrafluoride is an inorganic compound with the formula WF 4. This little studied solid has been invoked, together with tungsten pentafluoride , as an intermediate in the chemical vapor deposition of tungsten films using tungsten hexafluoride .
Tungsten oxyfluoride may refer to: Tungsten oxytetrafluoride, WOF 4; Tungsten difluoride dioxide, WO 2 F 2; The molybdenum oxyfluorides are a subset of metal oxyhalides
O 2 F 2 precipitates as a brown solid upon the UV irradiation of a mixture of liquid O 2 and F 2 at −196 °C. [8] It also only appears to be stable below −160 °C. [9] The general method of preparation of many oxygen fluorides is a gas-phase electric discharge in cold containers including O 2 F 2. [10] O 2 + F 2 → O 2 F 2 (electric ...
Many elements form anionic hexafluorides. Members of commercial interest are hexafluorophosphate (PF 6 −) and hexafluorosilicate (SiF 6 2−). Many transition metals form hexafluoride anions. Often the monoanions are generated by reduction of the neutral hexafluorides. For example, PtF 6 − arises by reduction of PtF 6 by O 2.
Tungsten hexacarbonyl (also called tungsten carbonyl) is an organometallic compound with the formula W(CO) 6. This complex gave rise to the first example of a dihydrogen complex. [2] Like its chromium and molybdenum analogs, this colorless compound is noteworthy as a volatile, air-stable derivative of tungsten in its zero oxidation state.