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Microoptoelectromechanical systems (MOEMS), also known as optical MEMS, are integrations of mechanical, optical, and electrical systems that involve sensing or manipulating optical signals at a very small size. MOEMS includes a wide variety of devices, for example optical switch, optical cross-connect, tunable VCSEL, microbolometers.
MEMS clock generators are useful in complex systems that require multiple frequencies, such as data servers and telecom switches. MEMS real-time clocks are used in systems that require precise time measurements. Smart meters for gas and electricity are an example that is consuming significant quantities of these devices.
An early example of a MEMS device is the resonant-gate transistor, an adaptation of the MOSFET, developed by Robert A. Wickstrom for Harvey C. Nathanson in 1965. [4] Another early example is the resonistor, an electromechanical monolithic resonator patented by Raymond J. Wilfinger between 1966 and 1971.
Microforming is a microfabrication process of microsystem or microelectromechanical system (MEMS) "parts or structures with at least two dimensions in the submillimeter range." [3] [4] [5] It includes techniques such as microextrusion, [4] microstamping, [6] and microcutting. [7]
The first reported piezoelectrically actuated RF MEMS switch was developed by scientists at the LG Electronics Institute of Technology in Seoul, South Korea in 2005. [3] The researchers designed and actualized a RF MEMS switch with a piezoelectric cantilever actuator that had an operation voltage of 2.5 volts. [7]
NEMS form the next logical miniaturization step from so-called microelectromechanical systems, or MEMS devices. NEMS typically integrate transistor-like nanoelectronics with mechanical actuators, pumps, or motors, and may thereby form physical, biological, and chemical sensors.
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