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  2. Focused ion beam - Wikipedia

    en.wikipedia.org/wiki/Focused_ion_beam

    FIB can also be incorporated in a system with both electron and ion beam columns, allowing the same feature to be investigated using either of the beams. FIB should not be confused with using a beam of focused ions for direct write lithography (such as in proton beam writing). These are generally quite different systems where the material is ...

  3. Ion beam analysis - Wikipedia

    en.wikipedia.org/wiki/Ion_beam_analysis

    Ion beam analysis (IBA) is an important family of modern analytical techniques involving the use of MeV ion beams to probe the composition and obtain elemental depth profiles in the near-surface layer of solids. IBA is not restricted to MeV energy ranges.

  4. Ion beam - Wikipedia

    en.wikipedia.org/wiki/Ion_beam

    A small ion beam rocket being tested by NASA. An ion beam is a beam of ions, a type of charged particle beam. Ion beams have many uses in electronics manufacturing (principally ion implantation) and other industries. There are many ion beam sources, some derived from the mercury vapor thrusters developed by NASA in the 1960s. The most widely ...

  5. Gas cluster ion beam - Wikipedia

    en.wikipedia.org/wiki/Gas_cluster_ion_beam

    In industry, GCIB has been used for the manufacture of semiconductor devices, [6] optical thin films, [7] trimming SAW and FBAR filter devices, [8] fixed disk memory systems and for other uses. GCIB smoothing of high voltage electrodes has been shown to reduce field electron emission and GCIB treated RF cavities are being studied for use in ...

  6. Stopping and Range of Ions in Matter - Wikipedia

    en.wikipedia.org/wiki/Stopping_and_Range_of_Ions...

    As the input parameters, it needs the ion type and energy (in the range 10 eV – 2 GeV) and the material of one or several target layers. As the output, it lists or plots the three-dimensional distribution of the ions in the solid and its parameters, such as penetration depth, its spread along the ion beam (called straggle) and perpendicular to it, all target atom cascades in the target are ...

  7. Ion milling machine - Wikipedia

    en.wikipedia.org/wiki/Ion_milling_machine

    Ion milling is a specialized physical etching technique that is a crucial step in the preparation of material analysis techniques. After a specimen goes through ion milling, the surface becomes much smoother and more defined, which allows scientists to study the material much easier.

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  9. Ion beam lithography - Wikipedia

    en.wikipedia.org/wiki/Ion_beam_lithography

    Ion-beam lithography, or ion-projection lithography, is similar to Electron beam lithography, but uses much heavier charged particles, ions. In addition to diffraction being negligible, ions move in straighter paths than electrons do both through vacuum and through matter, so there seems be a potential for very high resolution.

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