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The focused ion beam has become a powerful tool for site-specific 3D imaging of sub-micron features in a sample. In this FIB tomography technique, the sample is sequentially milled using an ion beam perpendicular to the specimen while imaging the newly exposed surface using an electron beam.
In plasma physics, an ion acoustic wave is one type of longitudinal oscillation of the ions and electrons in a plasma, much like acoustic waves traveling in neutral gas. However, because the waves propagate through positively charged ions, ion acoustic waves can interact with their electromagnetic fields , as well as simple collisions.
Ion beam analysis works on the basis that ion-atom interactions are produced by the introduction of ions to the sample being tested. Major interactions result in the emission of products that enable information regarding the number, type, distribution and structural arrangement of atoms to be collected.
A subclass of this is focused ion beam milling, where gallium ions are used to produce an electron transparent membrane or 'lamella' in a specific region of the sample, for example through a device within a microprocessor or a focused ion beam SEM. Ion beam milling may also be used for cross-section polishing prior to analysis of materials that ...
An ion beam is a beam of ions, a type of charged particle beam. Ion beams have many uses in electronics manufacturing (principally ion implantation) and other industries. There are many ion beam sources, some derived from the mercury vapor thrusters developed by NASA in the 1960s. The most widely used ion beams are of singly-charged ions.
As the helium ion beam interacts with the sample, it does not suffer from a large excitation volume, and hence provides sharp images with a large depth of field on a wide range of materials. Compared to a SEM, the secondary electron yield is quite high, allowing for imaging with currents as low as 1 femtoamp. The detectors provide information ...
The Electron beam ion trap (EBIT), based on the same principle, can produce up to bare uranium ions and can be used as an ion source as well. Heavy ions can also be generated with an ion gun which typically uses the thermionic emission of electrons to ionize a substance in its gaseous state.
The first step in ion sculpting is to make either a through hole or a blind hole (not penetrating completely), most commonly using a focused ion beam (FIB). The holes are commonly about 100 nm in diameter, but can be made much smaller. This step may or may not be done at room temperature, with a low temperature of -120 C. Next, three common ...