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A MEMS magnetic field sensor is a small-scale microelectromechanical systems (MEMS) device for detecting and measuring magnetic fields (magnetometer). Many of these operate by detecting effects of the Lorentz force : a change in voltage or resonant frequency may be measured electronically, or a mechanical displacement may be measured optically.
A MEMS magnetic actuator is a device that uses the microelectromechanical systems (MEMS) ... e.g. a MEMS accelerometer or a pressure sensor (could also measure ...
Helium vector magnetometer (HVM) of the Pioneer 10 and 11 spacecraft. A magnetometer is a device that measures magnetic field or magnetic dipole moment.Different types of magnetometers measure the direction, strength, or relative change of a magnetic field at a particular location.
Hall effect sensor; Hall probe; Magnetic anomaly detector; Magnetometer; Magnetoresistance; MEMS magnetic field sensor; Metal detector; Planar Hall sensor; Radio direction finder; Test light; Voltage detector
A Hall effect sensor (also known as a Hall sensor or Hall probe) is any sensor incorporating one or more Hall elements, each of which produces a voltage proportional to one axial component of the magnetic field vector B using the Hall effect (named for physicist Edwin Hall).
MEMS magnetic field sensor (magnetometer) may also be incorporated in such devices to provide directional heading. MEMS inertial navigation systems (INSs) of modern cars, airplanes, submarines and other vehicles to detect yaw, pitch, and roll; for example, the autopilot of an airplane. [27]
A copy of the GMR sensor developed by Peter Grünberg. One of the main applications of GMR materials is in magnetic field sensors, e.g., in hard disk drives [25] and biosensors, [31] as well as detectors of oscillations in MEMS. [31] A typical GMR-based sensor consists of seven layers: Silicon substrate, Binder layer, Sensing (non-fixed) layer,
NEMS form the next logical miniaturization step from so-called microelectromechanical systems, or MEMS devices. NEMS typically integrate transistor-like nanoelectronics with mechanical actuators, pumps, or motors, and may thereby form physical, biological, and chemical sensors.
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