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The phrase depth of focus is sometimes erroneously used to refer to depth of field (DOF), which is the distance from the lens in acceptable focus, whereas the true meaning of depth of focus refers to the zone behind the lens wherein the film plane or sensor is placed to produce an in-focus image. Depth of field depends on the focus distance ...
Photolithography (also known as optical lithography) is a process used in the manufacturing of integrated circuits. It involves using light to transfer a pattern onto a substrate, typically a silicon wafer .
The lenses in the highest resolution "dry" photolithography scanners focus light in a cone whose boundary is nearly parallel to the wafer surface. As it is impossible to increase resolution by further refraction, additional resolution is obtained by inserting an immersion medium with a higher index of refraction between the lens and the wafer.
The range of distances that are nearly in focus is called the depth of field. Depth of field generally increases with decreasing aperture diameter (increasing f-number). The unfocused blur outside the depth of field is sometimes used for artistic effect in photography. The subjective appearance of this blur is known as bokeh.
Sub resolution assist features that improves the depth of focus of isolated features. Phase-shift Mask: Etching quartz from certain areas of the mask (alt-PSM) or replacing Chrome with phase shifting Molybdenum Silicide layer (attenuated embedded PSM) to improve CD control and increase resolution Double or Multiple Patterning
Deep focus is a photographic and cinematographic technique using a large depth of field. Depth of field is the front-to-back range of focus in an image, or how much of it appears sharp and clear. In deep focus, the foreground, middle ground, and background are all in focus. Deep focus is normally achieved by choosing a small aperture.
Acceptably sharp focus" is defined using a property called the "circle of confusion". The depth of field can be determined by focal length, distance to subject (object to be imaged), the acceptable circle of confusion size, and aperture. [2] Limitations of depth of field can sometimes be overcome with various techniques and equipment.
Depth of Field is precisely the same as depth of focus, only in the former case the depth is measured by the movement of the plate, the object being fixed, while in the latter case the depth is measured by the distance through which the object can be moved without the circle of confusion exceeding 2 e.