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A turbomolecular pump is a type of vacuum pump, superficially similar to a turbopump, used to obtain and maintain high vacuum. [ 1 ] [ 2 ] These pumps work on the principle that gas molecules can be given momentum in a desired direction by repeated collision with a moving solid surface.
A cutaway view of a turbomolecular high vacuum pump. In a momentum transfer pump (or kinetic pump [16]), gas molecules are accelerated from the vacuum side to the exhaust side (which is usually maintained at a reduced pressure by a positive displacement pump). Momentum transfer pumping is only possible below pressures of about 0.1 kPa.
The turbomolecular pump overcame many of these disadvantages. Many modern turbomolecular pumps contain built-in molecular drag stages, which allows them to operate at higher foreline pressures. As a stage in turbo molecular pumps, the most widely used design is the Holweck type, due to a significantly higher pumping speed than the Gaede design.
Pages in category "Vacuum pumps" The following 18 pages are in this category, out of 18 total. ... Turbomolecular pump; V. Vacuum ejector; Vacuum engineering;
The newly emerged dry pumps and turbomolecular pumps supported innovation in the scientific instrument markets over the next couple of decades. The scientific instrument market is now the second biggest market for Edwards Vacuum, after the semiconductor and electronics industry.
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