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A position sensor is a sensor that detects an object's position. A position sensor may indicate the absolute position of the object (its location) or its relative position (displacement) in terms of linear travel, rotational angle or three-dimensional space. Common types of position sensors include the following: Capacitive displacement sensor
Capacitive displacement sensors can be used to measure the position of objects down to the nanometer level. This type of precise positioning is used in the semiconductor industry where silicon wafers need to be positioned for exposure. Capacitive sensors are also used to pre-focus the electron microscopes used in testing and examining the wafers.
Displacement measurement is the measurement of changes in directed distance (displacement). Devices measuring displacement are based on displacement sensors, which can be contacting or non-contacting. [1] Some displacement sensors are based on displacement transducers, [2] devices which convert displacement into another form of energy. [3]
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PSDs can be divided into two classes which work according to different principles: In the first class, the sensors have an isotropic sensor surface that supplies continuous position data. The second class has discrete sensors in an raster-like structure on the sensor surface that supply local discrete data.
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