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MEMS microcantilever resonating inside a scanning electron microscope Proposal submitted to DARPA in 1986 first introducing the term "microelectromechanical systems". MEMS (micro-electromechanical systems) is the technology of microscopic devices incorporating both electronic and moving parts.
A radio-frequency microelectromechanical system (RF MEMS) is a microelectromechanical system with electronic components comprising moving sub-millimeter-sized parts that provide radio-frequency (RF) functionality. [1] RF functionality can be implemented using a variety of RF technologies.
Journal of Microelectromechanical Systems is a peer-reviewed scientific journal published bimonthly by IEEE.It covers advances in MEMS and related microtechnologies.Published under the joint sponsorship of IEEE Electron Devices Society, IEEE Industrial Electronics Society, and IEEE Robotics and Automation Society, its editor-in-chief is Gianluca Piazza (Carnegie Mellon University).
During 1991-1993, Dr. M. Edward Motamedi, a former Rockwell International innovator in the areas of both microelectromechanical systems and micro-optics, used internally the acronym of MOEMS for microoptoelectromechanical systems. This was to distinguish between optical MEMS and MOEMS, where optical MEMS could include bulk optics but MOEMS is ...
A piezoelectric microelectromechanical system (piezoMEMS) is a miniature or microscopic device that uses piezoelectricity to generate motion and carry out its tasks. It is a microelectromechanical system that takes advantage of an electrical potential that appears under mechanical stress.
The Journal of Micromechanics and Microengineering is a peer-reviewed scientific journal that covers all aspects of microelectromechanical systems, devices and structures, as well as micromechanics, microengineering, and microfabrication. The editor-in-chief is Weileun Fang (National Tsing Hua University).
Microforming is a microfabrication process of microsystem or microelectromechanical system (MEMS) "parts or structures with at least two dimensions in the submillimeter range." [3] [4] [5] It includes techniques such as microextrusion, [4] microstamping, [6] and microcutting. [7]
Pages in category "Microelectronic and microelectromechanical systems" The following 24 pages are in this category, out of 24 total. This list may not reflect recent changes .