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UV LED Curing equipment [4] Low-pressure mercury-vapor lamps generate primarily 254 nm 'UVC' energy, and are most commonly used in disinfection applications. Operated at lower temperatures and with less voltage than medium-pressure lamps, they, like all UV sources, require shielding when operated to prevent excess exposure of skin and eyes.
Excimer laser was proposed in 1960 by Fritz Houtermans. [1] The excimer laser development started with the observation of a nascent spectral line narrowing at 176 nm reported in 1971 [2] by Nikolai Basov, V. A. Danilychev and Yu. M. Popov, at the Lebedev Physical Institute in Moscow, using liquid xenon dimer (Xe 2) excited by an electron beam.
An aspect ratio of (> 20) has been achieved with the solution formulation [2] and (> 40) has been demonstrated from the dry resist. [3] Its maximum absorption is for ultraviolet light with a wavelength of the i-line: 365 nm (it is not practical to expose SU-8 with g-line ultraviolet light).
The main advantages of excimer lamps over other sources of UV and VUV radiation are as follows: high average specific power of UV radiation (up to 1 Watt per cubic centimeter of active medium); high energy of an emitted photon (from 3.5 to 11.5 eV); quasimonochromatic radiation with the spectral full-width at half maximum from 2 to 15 nm;
Typical mercury-vapor lamps with an outer envelope made of soda lime or borosilicate glass still allow a relatively large amount of 365 nm UV radiation to escape the lamp. This can cause the accelerated aging of some plastics used in the construction of luminaires, leaving them significantly discolored after only a few years' service.
UV radiation at 185 nm is used to generate ozone. The UV lamps for water treatment consist of specialized low-pressure mercury-vapor lamps that produce ultraviolet radiation at 254 nm, or medium-pressure UV lamps that produce a polychromatic output from 200 nm to visible and infrared energy. The UV lamp never contacts the water; it is either ...
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