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The scanning helium microscope (SHeM) is a form of microscopy that uses low-energy (5–100 meV) neutral helium atoms to image the surface of a sample without any damage to the sample caused by the imaging process. Since helium is inert and neutral, it can be used to study delicate and insulating surfaces.
A scanning helium ion microscope (SHIM, HeIM or HIM) is an imaging technology based on a scanning helium ion beam. [2] Similar to other focused ion beam techniques, it allows to combine milling and cutting of samples with their observation at sub-nanometer resolution.
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Scanning helium microscope may refer to: Scanning helium microscopy; Scanning Helium Ion Microscope; Atomic nanoscope, which was proposed and discussed in the literature, but is not yet competitive with optical microscope, electron microscope, Scanning Helium Ion Microscope and various scanning probe microscopes
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