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An early example of a MEMS device is the resonant-gate transistor, an adaptation of the MOSFET, developed by Robert A. Wickstrom for Harvey C. Nathanson in 1965. [4] Another early example is the resonistor, an electromechanical monolithic resonator patented by Raymond J. Wilfinger between 1966 and 1971.
An example of a bio-MEMS device is this automated FISH microchip, which integrates a reagent multiplexer, a cell chamber with a thin-film heater layer, and a peristaltic pump. [1] Bio-MEMS is an abbreviation for biomedical (or biological) microelectromechanical systems.
NEMS form the next logical miniaturization step from so-called microelectromechanical systems, or MEMS devices. NEMS typically integrate transistor-like nanoelectronics with mechanical actuators , pumps, or motors, and may thereby form physical, biological, and chemical sensors .
Microelectromechanical systems (MEMS) Generic term to describe micron scale electrical/mechanical devices. Mesoscale A device or structure larger than the nanoscale (10^-9 m) and smaller than the megascale. Microencapsulation Individually encapsulated small particles. Molecular assembler
Microoptoelectromechanical systems (MOEMS), also known as optical MEMS, are integrations of mechanical, optical, and electrical systems that involve sensing or manipulating optical signals at a very small size. MOEMS includes a wide variety of devices, for example optical switch, optical cross-connect, tunable VCSEL, microbolometers.
MEMS clock generators are MEMS timing devices with multiple outputs for systems that need more than a single reference frequency. MEMS oscillators are a valid alternative to older, more established quartz crystal oscillators, offering better resilience against vibration and mechanical shock, and reliability with respect to temperature variation.
A MEMS magnetic actuator is a device that uses the microelectromechanical systems (MEMS) to convert an electric current into a mechanical output by employing the well-known Lorentz Force Equation or the theory of Magnetism.
RF MEMS components are biased electrostatically using a bipolar NRZ drive voltage, as shown in Fig. 2, in order to avoid dielectric charging [11] and to increase the lifetime of the device. Dielectric charges exert a permanent electrostatic force on the beam.