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Focused ion beam, also known as FIB, is a technique used particularly in the semiconductor industry, materials science and increasingly in the biological field for site-specific analysis, deposition, and ablation of materials. A FIB setup is a scientific instrument that resembles a scanning electron microscope (SEM).
An electrostatic lens is a device that assists in the transport of charged particles. [1] [2] [3] For instance, it can guide electrons emitted from a sample to an electron analyzer, analogous to the way an optical lens assists in the transport of light in an optical instrument.
The configuration of the ion beam apparatus can be changed and made more complex with the incorporation of additional components. The techniques for ion beam analysis are designed for specific purposes. Some techniques and ion sources are shown in table 1. Detector types and arrangements for ion beam techniques are shown in table 2.
Implementation of an einzel lens showing the ion path. Six plates are parallel to the ion flight path with the middle plate at a particular potential. An einzel lens (from German: Einzellinse – single lens [1]), or unipotential lens, [2] is a charged particle electrostatic lens that focuses without changing the energy of the beam. It consists ...
Ion-beam lithography offers higher resolution patterning than UV, X-ray, or electron beam lithography because these heavier particles have more momentum. This gives the ion beam a smaller wavelength than even an e-beam and therefore almost no diffraction. The momentum also reduces scattering in the target and in any residual gas.
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The electron beam is focused by a thick magnetic lens. In a sharp crossover, the electron current density can reach values, which significantly exceed that for the Brillouin focusing of laminar flow of electrons. [5] The extraction of ions from the ion source can be realized in both axial and radial directions.
An ion beam is a beam of ions, a type of charged particle beam. Ion beams have many uses in electronics manufacturing (principally ion implantation) and other industries. There are many ion beam sources, some derived from the mercury vapor thrusters developed by NASA in the 1960s. The most widely used ion beams are of singly-charged ions.