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This is a bottom-up nanomanufacturing technique for the fabrication of ferroelectric, piezoelectrically-active nanotubes. The method uses electron beam lithography to draw a vacuum on the precursor sol-gel solution, thereby creating a polymeric template.
The use of nanoparticles and nanofibers to produce specialized nanofabrics became a subject of interest after the sol-gel [12] and electrospinning [13] techniques were fully developed in the 1980s. [14] Since 2000, dramatic increases in global funding have accelerated research efforts in nanotechnology, including nanofabrics research. [15]
Dry cleaning methods include oxygen and argon plasma treatments to remove unwanted surface layers, or hydrogen bake at elevated temperature to remove native oxide before epitaxy. Pre-gate cleaning is the most critical cleaning step in CMOS fabrication: it ensures that the ca. 2 nm thick oxide of a MOS transistor can be grown in an orderly fashion.
Another group of nano-technological techniques include those used for fabrication of nanotubes and nanowires, those used in semiconductor fabrication such as deep ultraviolet lithography, electron beam lithography, focused ion beam machining, nanoimprint lithography, atomic layer deposition, and molecular vapor deposition, and further including ...
The top-down approach is breaking down of a system into small components, while bottom-up is assembling sub-systems into larger system. [15] A bottom-up approach for nano-assembly is a primary research target for nano-fabrication because top down synthesis is expensive (requiring external work) and is not selective on very small length scales, but is currently the primary mode of industrial ...
The diluted solutions separated by this method show various colors. [68] The separated carbon nanotubes using this method have been applied to electrodes, e.g. electric double-layer capacitor. [69] Moreover, SWNTs can be separated by the column chromatography method. Yield is 95% in semiconductor type SWNT and 90% in metallic type SWNT. [70]
Optical Lithography (or photolithography) is one of the most important and prevalent sets of techniques in the nanolithography field. Optical lithography contains several important derivative techniques, all that use very short light wavelengths in order to change the solubility of certain molecules, causing them to wash away in solution, leaving behind a desired structure.
The template synthesis method uses a nanoporous membrane template composed of cylindrical pores of uniform diameter to make fibrils (solid nanofiber) and tubules (hollow nanofiber). [51] [52] This method can be used to prepare fibrils and tubules of many types of materials, including metals, semiconductors and electronically conductive polymers.