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A turbomolecular pump is a type of vacuum pump, superficially similar to a turbopump, used to obtain and maintain high vacuum. [ 1 ] [ 2 ] These pumps work on the principle that gas molecules can be given momentum in a desired direction by repeated collision with a moving solid surface.
There are two common types of pumps used in turbopumps: a centrifugal pump, where the pumping is done by throwing fluid outward at high speed, or an axial-flow pump, where alternating rotating and static blades progressively raise the pressure of a fluid. Axial-flow pumps have small diameters but give relatively modest pressure increases.
A roughing pump is any vacuum pump (typically mechanical) used to initially evacuate a vacuum system, as a first stage towards achieving high vacuum or ultra high vacuum.The term "roughing pump" derives from the vacuum range it works in, "rough vacuum", above 1x10 −3 torr (0.1 Pa).
An oil diffusion pump is used to achieve higher vacuum (lower pressure) than is possible by use of positive displacement pumps alone. Although its use has been mainly associated within the high-vacuum range, down to 1 × 10 −9 mbar (1 × 10 −7 Pa), diffusion pumps today can produce pressures approaching 1 × 10 −10 mbar (1 × 10 −8 Pa) when properly used with modern fluids and accessories.
After the war, some of the inventions found new applications. The first transistor radio was released in 1954, and its manufacturing process made use of vacuum pumps. [43] The first integrated circuit or “chip” came to the market at the end of the 1950s, and vacuum pumps again played an important role in their production. These early ...
A molecular drag pump is a type of vacuum pump that utilizes the drag of air molecules against a rotating surface. [1] The most common sub-type is the Holweck pump, which contains a rotating cylinder with spiral grooves which direct the gas from the high vacuum side of the pump to the low vacuum side of the pump. [2]
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