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Dip pen nanolithography (DPN) is a scanning probe lithography technique where an atomic force microscope (AFM) tip is used to directly create patterns on a substrate. [1] It can be done on a range of substances with a variety of inks. A common example of this technique is exemplified by the use of alkane thiolates to imprint onto a gold surface ...
Dip-pen scanning probe lithography (dp-SPL) or dip-pen nanolithography (DPN) is a scanning probe lithography technique based on diffusion, where the tip is employed to create patterns on a range of substances by deposition of a variety of liquid inks.
Some of the important techniques in this category include dip-pen nanolithography, thermochemical nanolithography, thermal scanning probe lithography, and local oxidation nanolithography. Dip-pen nanolithography is the most widely used of these techniques. [8]
Thermal polymer decomposition. Thermal scanning probe lithography (t-SPL) is a form of scanning probe lithography [1] (SPL) whereby material is structured on the nanoscale using scanning probes, primarily through the application of thermal energy. Related fields are thermo-mechanical SPL (see also Millipede memory), thermochemical SPL[2][3] (or ...
Photolithography. Photolithography (also known as optical lithography) is a process used in the manufacturing of integrated circuits. It involves using light to transfer a pattern onto a substrate, typically a silicon wafer. The process begins with a photosensitive material, called a photoresist, being applied to the substrate.
Nanofountain probe. A nanofountain probe ( NFP) is a device for 'drawing' micropatterns of liquid chemicals at extremely small resolution. An NFP contains a cantilevered micro-fluidic device terminated in a nanofountain. The embedded microfluidics facilitates rapid and continuous delivery of molecules from the on-chip reservoirs to the fountain ...
Maskless lithography has two approaches to project a pattern: rasterized and vectorized. In the first one it utilizes generation of a time-variant intermittent image on an electronically modifiable (virtual) mask that is projected with known means (also known as laser direct imaging and other synonyms). In the vectored approach, direct writing ...
Recently, SPM based lithography gained attention due to its simplicity and precise control the structure and location. A new development of this technique is the dip pen nanolithography (DPN), which uses the AFM technique to deliver organic molecules on different substrates, as gold. Using EC-AFM allows to fabricate metal and semiconductor ...
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