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Piranha solution, also known as piranha etch, is a mixture of sulfuric acid (H 2 SO 4) and hydrogen peroxide (H 2 O 2). The resulting mixture is used to clean organic residues off substrates , for example silicon wafers . [ 1 ]
The optional second step (for bare silicon wafers) is a short immersion in a 1:100 or 1:50 solution of aqueous HF (hydrofluoric acid) at 25 °C for about fifteen seconds, in order to remove the thin oxide layer and some fraction of ionic contaminants. If this step is performed without ultra high purity materials and ultra clean containers, it ...
In single-crystal materials (e.g. silicon wafers), this effect can allow very high anisotropy, as shown in the figure. The term "crystallographic etching" is synonymous with "anisotropic etching along crystal planes". However, for some non-crystal materials like glass, there are unconventional ways to etch in an anisotropic manner. [2]
Piranha solution in particular constitutes quite a harsh treatment that can potentially damage the integrity of the silicon surface. Finlayson-Pitts et al. investigated the effect of certain treatments on silicon and concluded that both the roughness (3-5 Å) and the presence of scattered large particles were preserved after 1 cycle of plasma ...
Fig. 1. The surface of a MEMS device is cleaned with bright, blue oxygen plasma in a plasma etcher to rid it of carbon contaminants. (100mTorr, 50W RF) Plasma cleaning is the removal of impurities and contaminants from surfaces through the use of an energetic plasma or dielectric barrier discharge (DBD) plasma created from gaseous species.
In chemistry, solvent effects are the influence of a solvent on chemical reactivity or molecular associations. Solvents can have an effect on solubility , stability and reaction rates and choosing the appropriate solvent allows for thermodynamic and kinetic control over a chemical reaction.
Using piranha solution to clean fritted glassware is a huge safety no-no and this article should not be proposing it as reasonable practice in any lab environment. 198.179.125.170 17:46, 14 November 2018 (UTC) Is the problem with piranha and frits, or with piranha and frits which still have organic solvents on them? Certainly the second has a ...
One laboratory scale preparation of Caro's acid involves the combination of chlorosulfuric acid and hydrogen peroxide: [6]. H 2 O 2 + ClSO 2 OH ⇌ H 2 SO 5 + HCl. Patents include more than one reaction for preparation of Caro's acid, usually as an intermediate for the production of potassium monopersulfate (PMPS), a bleaching and oxidizing agent.