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Piezoelectric micromachined ultrasonic transducers (PMUT) are MEMS-based piezoelectric ultrasonic transducers.Unlike bulk piezoelectric transducers which use the thickness-mode motion of a plate of piezoelectric ceramic such as PZT or single-crystal PMN-PT, PMUT are based on the flexural motion of a thin membrane coupled with a thin piezoelectric film, such as PVDF.
The additive approach: The piezoelectric thin films are deposited on silicon substrates with layers of insulating and conducting material followed by surface or silicon bulk micromachining. The subtractive approach: Single crystal or polycrystalline piezoelectrics and piezoceramics are subjected to direct bulk micromachining and then electrodes.
A thin-film bulk acoustic resonator (FBAR or TFBAR) is a device consisting of a piezoelectric material manufactured by thin film methods between two conductive – typically metallic – electrodes and acoustically isolated from the surrounding medium.
Ultrasonic motors also offer arbitrarily large rotation or sliding distances, while piezoelectric actuators are limited by the static strain that may be induced in the piezoelectric element. One common application of ultrasonic motors is in camera lenses where they are used to move lens elements as part of the auto-focus system.
The use of a piezoelectric device should not be confused with Drop-On-Demand Inkjet which uses the piezo to generate sound waves in nozzles or expand the fluid chamber size to push single drops from a nozzle. The CIJ formed ink drops are either deflected by an electric field towards the desired location on the substrate or collected for reuse.
A piezoelectric nanogenerator is an energy-harvesting device capable of converting external kinetic energy into electrical energy via action by a nano-structured piezoelectric material. It is generally used to indicate kinetic energy harvesting devices utilizing nano-scaled piezoelectric material, like in thin-film bulk acoustic resonators. [20 ...
A crucial issue for a roll-to-roll thin-film cell production system is the deposition rate of the microcrystalline layer, and this can be tackled using four approaches: [5] very high frequency plasma-enhanced chemical vapour deposition (VHF-PECVD) microwave -PECVD; hot wire chemical vapour deposition (hot-wire CVD)
The ink channels in a piezoelectric ink jet print head can be formed using a variety of techniques, but one common method is lamination of a stack of metal plates, each of which includes precision micro-fabricated features of various shapes (i.e. containing an ink channel, orifice, reservoir and crystal).