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An example of a bio-MEMS device is this automated FISH microchip, which integrates a reagent multiplexer, a cell chamber with a thin-film heater layer, and a peristaltic pump. [1] Bio-MEMS is an abbreviation for biomedical (or biological) microelectromechanical systems.
An early example of a MEMS device is the resonant-gate transistor, an adaptation of the MOSFET, developed by Robert A. Wickstrom for Harvey C. Nathanson in 1965. [4] Another early example is the resonistor, an electromechanical monolithic resonator patented by Raymond J. Wilfinger between 1966 and 1971.
Microoptoelectromechanical systems (MOEMS), also known as optical MEMS, are integrations of mechanical, optical, and electrical systems that involve sensing or manipulating optical signals at a very small size. MOEMS includes a wide variety of devices, for example optical switch, optical cross-connect, tunable VCSEL, microbolometers.
Lab-on-a-chip devices are a subset of microelectromechanical systems (MEMS) devices and sometimes called "micro total analysis systems" (μTAS). LOCs may use microfluidics, the physics, manipulation and study of minute amounts of fluids. However, strictly regarded "lab-on-a-chip" indicates generally the scaling of single or multiple lab ...
Brain-on-a-chip devices are devices that allow the culturing and manipulation of brain-related tissues through microfabrication and microfluidics by: 1) improving culture viability; 2) supporting high-throughput screening for simple models; 3) modeling tissue or organ-level physiology and disease in vitro/ex vivo, and 4) adding high precision ...
MEMS clock generators are useful in complex systems that require multiple frequencies, such as data servers and telecom switches. MEMS real-time clocks are used in systems that require precise time measurements. Smart meters for gas and electricity are an example that is consuming significant quantities of these devices.
The constituting elements of bio-nanoelectromechanical systems (BioNEMS) are of nanoscale size, for example DNA, proteins or nanostructured mechanical parts. Examples include the facile top-down nanostructuring of thiol-ene polymers to create cross-linked and mechanically robust nanostructures that are subsequently functionalized with proteins.
MOSFETs are also widely used in microelectromechanical systems (MEMS), as silicon MOSFETs could interact and communicate with the surroundings and process things such as chemicals, motions and light. [77] An early example of a MEMS device is the resonant-gate transistor, an adaptation of the MOSFET, developed by Harvey C. Nathanson in 1965. [78]