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During 1991-1993, Dr. M. Edward Motamedi, a former Rockwell International innovator in the areas of both microelectromechanical systems and micro-optics, used internally the acronym of MOEMS for microoptoelectromechanical systems. This was to distinguish between optical MEMS and MOEMS, where optical MEMS could include bulk optics but MOEMS is ...
The global market for micro-electromechanical systems, which includes products such as automobile airbag systems, display systems and inkjet cartridges totaled $40 billion in 2006 according to Global MEMS/Microsystems Markets and Opportunities, a research report from SEMI and Yole Development and is forecasted to reach $72 billion by 2011. [39]
Cantilevered beams are the most ubiquitous structures in the field of microelectromechanical systems (MEMS). An early example of a MEMS cantilever is the Resonistor, [7] [8] an electromechanical monolithic resonator. MEMS cantilevers are commonly fabricated from silicon (Si), silicon nitride (Si 3 N 4), or polymers.
Microforming is a microfabrication process of microsystem or microelectromechanical system (MEMS) "parts or structures with at least two dimensions in the submillimeter range." [ 3 ] [ 4 ] [ 5 ] It includes techniques such as microextrusion , [ 4 ] microstamping , [ 6 ] and microcutting. [ 7 ]
A radio-frequency microelectromechanical system (RF MEMS) is a microelectromechanical system with electronic components comprising moving sub-millimeter-sized parts that provide radio-frequency (RF) functionality. [1] RF functionality can be implemented using a variety of RF technologies.
The Journal of Micromechanics and Microengineering is a peer-reviewed scientific journal that covers all aspects of microelectromechanical systems, devices and structures, as well as micromechanics, microengineering, and microfabrication. The editor-in-chief is Weileun Fang (National Tsing Hua University).
The term MEMS, for Micro Electro Mechanical Systems, was coined in the 1980s to describe new, sophisticated mechanical systems on a chip, such as micro electric motors, resonators, gears, and so on. Today, the term MEMS in practice is used to refer to any microscopic device with a mechanical function, which can be fabricated in a batch process ...
Microoptomechanical systems (MOMS), also written as micro-optomechanical systems, are a special class of microelectromechanical systems (MEMS) which use optical and mechanical, but not electronic components.