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2. Roughing pump - Wikipedia

   en.wikipedia.org/wiki/Roughing_pump

   A roughing pump is any vacuum pump (typically mechanical) used to initially evacuate a vacuum system, as a first stage towards achieving high vacuum or ultra high vacuum. The term "roughing pump" derives from the vacuum range it works in, "rough vacuum", above 1x10 −3 torr (0.1 Pa). Pumps that operate in the high vacuum ranges typically don't ...

3. Ultra-high vacuum - Wikipedia

   en.wikipedia.org/wiki/Ultra-high_vacuum

   Ultra-high vacuum (often spelled ultrahigh in American English, UHV) is the vacuum regime characterised by pressures lower than about 1 × 10 −6 pascals (1.0 × 10 −8 mbar; 7.5 × 10 −9 Torr). UHV conditions are created by pumping the gas out of a UHV chamber. At these low pressures the mean free path of a gas molecule is greater than ...

4. Vacuum pump - Wikipedia

   en.wikipedia.org/wiki/Vacuum_pump

   Vacuum pump. The Roots blower is one example of a vacuum pump. A vacuum pump is a type of pump device that draws gas particles from a sealed volume in order to leave behind a partial vacuum. The first vacuum pump was invented in 1650 by Otto von Guericke, and was preceded by the suction pump, which dates to antiquity.

5. Scroll compressor - Wikipedia

   en.wikipedia.org/wiki/Scroll_compressor

   Scroll compressor. A scroll compressor (also called spiral compressor, scroll pump and scroll vacuum pump) is a device for compressing air or refrigerant. [ 1 ] It is used in air conditioning equipment, as an automobile supercharger (where it is known as a scroll-type supercharger) and as a vacuum pump. Many residential central heat pump and ...

6. Diffusion pump - Wikipedia

   en.wikipedia.org/wiki/Diffusion_pump

   An oil diffusion pump is used to achieve higher vacuum (lower pressure) than is possible by use of positive displacement pumps alone. Although its use has been mainly associated within the high-vacuum range, down to 1 × 10 −9 mbar (1 × 10 −7 Pa), diffusion pumps today can produce pressures approaching 1 × 10 −10 mbar (1 × 10 −8 Pa) when properly used with modern fluids and accessories.

7. Turbomolecular pump - Wikipedia

   en.wikipedia.org/wiki/Turbomolecular_pump

   A turbomolecular pump is a type of vacuum pump, superficially similar to a turbopump, used to obtain and maintain high vacuum. [1][2] These pumps work on the principle that gas molecules can be given momentum in a desired direction by repeated collision with a moving solid surface. In a turbomolecular pump, a rapidly spinning fan rotor 'hits ...