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Scanning probe lithography[1] (SPL) describes a set of nanolithographic methods to pattern material on the nanoscale using scanning probes. It is a direct-write, mask-less approach which bypasses the diffraction limit and can reach resolutions below 10 nm. [2] It is considered an alternative lithographic technology often used in academic and ...
Dip pen nanolithography (DPN) is a scanning probe lithography technique where an atomic force microscope (AFM) tip is used to directly create patterns on a substrate. [1] It can be done on a range of substances with a variety of inks. A common example of this technique is exemplified by the use of alkane thiolates to imprint onto a gold surface ...
Thermal polymer decomposition. Thermal scanning probe lithography (t-SPL) is a form of scanning probe lithography [1] (SPL) whereby material is structured on the nanoscale using scanning probes, primarily through the application of thermal energy. Related fields are thermo-mechanical SPL (see also Millipede memory), thermochemical SPL[2][3] (or ...
Some of the important techniques in this category include dip-pen nanolithography, thermochemical nanolithography, thermal scanning probe lithography, and local oxidation nanolithography. Dip-pen nanolithography is the most widely used of these techniques. [8]
Technology portal. v. t. e. Scanning probe microscopy (SPM) is a branch of microscopy that forms images of surfaces using a physical probe that scans the specimen. SPM was founded in 1981, with the invention of the scanning tunneling microscope, an instrument for imaging surfaces at the atomic level. The first successful scanning tunneling ...
Thermochemical nanolithography ( TCNL) or thermochemical scanning probe lithography ( tc-SPL) is a scanning probe microscopy -based nanolithography technique which triggers thermally activated chemical reactions to change the chemical functionality or the phase of surfaces. Chemical changes can be written very quickly through rapid probe ...
A nanofountain probe ( NFP) is a device for 'drawing' micropatterns of liquid chemicals at extremely small resolution. An NFP contains a cantilevered micro-fluidic device terminated in a nanofountain. The embedded microfluidics facilitates rapid and continuous delivery of molecules from the on-chip reservoirs to the fountain tip.
Kelvin probe force microscopy (KPFM), also known as surface potential microscopy, is a noncontact variant of atomic force microscopy (AFM). [1][2][3] By raster scanning in the x,y plane the work function of the sample can be locally mapped for correlation with sample features. When there is little or no magnification, this approach can be ...