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Piezoelectric micromachined ultrasonic transducers (PMUT) are MEMS-based piezoelectric ultrasonic transducers.Unlike bulk piezoelectric transducers which use the thickness-mode motion of a plate of piezoelectric ceramic such as PZT or single-crystal PMN-PT, PMUT are based on the flexural motion of a thin membrane coupled with a thin piezoelectric film, such as PVDF.
The use of thin film piezoelectric materials in electronics began in the early 1960s at Bell Telephone Laboratories/Bell Labs. Earlier piezoelectric crystals were developed and used as resonators in applications like oscillators with frequencies up to 100 MHz. Thinning was applied for increasing the resonance frequency of the crystals.
The additive approach: The piezoelectric thin films are deposited on silicon substrates with layers of insulating and conducting material followed by surface or silicon bulk micromachining. The subtractive approach: Single crystal or polycrystalline piezoelectrics and piezoceramics are subjected to direct bulk micromachining and then electrodes.
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Canon was one of the pioneers of the ultrasonic motor, and made the "USM" famous in the late 1980s by incorporating it into its autofocus lenses for the Canon EF lens mount. Numerous patents on ultrasonic motors have been filed by Canon, its chief lensmaking rival Nikon , and other industrial concerns since the early 1980s.
A piezoelectric disk generates a voltage when deformed (change in shape is greatly exaggerated) A piezoelectric sensor is a device that uses the piezoelectric effect to measure changes in pressure, acceleration, temperature, strain, or force by converting them to an electrical charge. The prefix piezo-is Greek for 'press' or 'squeeze'. [1]
Thin-film optics is the branch of optics that deals with very thin structured layers of different materials. [1] In order to exhibit thin-film optics, the thickness of the layers of material must be similar to the coherence length ; for visible light it is most often observed between 200 and 1000 nm of thickness.
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