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The standard liter per minute (SLM or SLPM) is a unit of (molar or) mass flow rate of a gas at standard conditions for temperature and pressure (STP), which is most commonly practiced in the United States, whereas European practice revolves around the normal litre per minute (NLPM). [1]
One example of standard conditions for the calculation of SCCM is = 0 °C (273.15 K) [1] and = 1.01 bar (14.72 psia) and a unity compressibility factor = 1 (i.e., an ideal gas is used for the definition of SCCM). [2] This example is for the semi-conductor-manufacturing industry.
Since 1982, STP has been defined as a temperature of 273.15 K (0 °C, 32 °F) and an absolute pressure of exactly 1 bar (100 kPa, 10 5 Pa). NIST uses a temperature of 20 °C (293.15 K, 68 °F) and an absolute pressure of 1 atm (14.696 psi, 101.325 kPa). [3] This standard is also called normal temperature and pressure (abbreviated as NTP).
The word bar has its origin in the Ancient Greek word βάρος (baros), meaning weight. The unit's official symbol is bar; [citation needed] the earlier symbol b is now deprecated and conflicts with the uses of b denoting the unit barn or bit, but it is still encountered, especially as mb (rather than the proper mbar) to denote the
Liquid helium is a physical state of helium at very low temperatures at standard atmospheric pressures. Liquid helium may show superfluidity . At standard pressure, the chemical element helium exists in a liquid form only at the extremely low temperature of −269 °C (−452.20 °F; 4.15 K).
To convert from / to /, multiply by 100. To convert from / ... 1 J·m 3 /mol 2 = 1 m 6 ·Pa/mol 2 = 10 L 2 ·bar/mol 2. 1 L 2 atm/mol 2 = 0.101325 J·m 3 /mol 2 = 0. ...
A msw is defined as 0.1 bar (= 10,000 Pa), is not the same as a linear metre of depth. 33.066 fsw = 1 atm [citation needed] (1 atm = 101,325 Pa / 33.066 = 3,064.326 Pa). The pressure conversion from msw to fsw is different from the length conversion: 10 msw = 32.6336 fsw, while 10 m = 32.8083 ft. [citation needed]
By {{Convert}} default, the conversion result will be rounded either to precision comparable to that of the input value (the number of digits after the decimal point—or the negative of the number of non-significant zeroes before the point—is increased by one if the conversion is a multiplication by a number between 0.02 and 0.2, remains the ...