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Ammonium fluoride is a critical component of buffered oxide etch (BOE), a wet etchant used in microfabrication. It acts as the buffering agent in a solution of concentrated HF , creating an etchant with a more controllable rate of etching (than that of simple concentrated HF solutions).
Chemical formula Synonyms CAS number C 10 H 16 N 2 O 8: Ethylenediaminetetraacetic acid (EDTA): 6381–92–6 C 12 H 22 O 11: sucrose: 57–50–1 C 18 H 29 O 3 S: sodium dodecyl benzenesulfonate: 2155–30–0
Tetra-n-butylammonium fluoride, commonly abbreviated to TBAF and n-Bu 4 NF, is a quaternary ammonium salt with the chemical formula (CH 3 CH 2 CH 2 CH 2) 4 N + F −. It is commercially available as the white solid trihydrate and as a solution in tetrahydrofuran. TBAF is used as a source of fluoride ion in organic solvents. [1]
Tetrabutylammonium is a quaternary ammonium cation with the formula [N(C 4 H 9) 4] +, also denoted [NBu 4] + (where Bu = butyl group). It is used in the research laboratory to prepare lipophilic salts of inorganic anions. Relative to tetraethylammonium derivatives, tetrabutylammonium salts are more lipophilic but crystallize less readily.
Most other soluble salts of fluoride are in fact bifluorides, HF 2 –. Historically, there have been two main approaches to prepare tetramethylammonium fluoride: hydrofluoric acid neutralization of tetramethylammonium hydroxide, and salt metathesis between different ammonium salts and inorganic fluoride sources, such as KF or CsF. [1]
Ammonium tetrafluoroborate (or ammonium fluoroborate) is an inorganic salt composed of the ammonium cation and the tetrafluoroborate anion, with the chemical formula NH 4 BF 4. When heated to decomposition, ammonium tetrafluoroborate releases toxic fumes of hydrogen fluoride , nitrogen oxides , and ammonia .
Buffered oxide etch is commonly used for more controllable etching. [1] Buffering HF with NH 4 F results in a solution with a more stable pH; thus, more stable concentrations of HF and HF − 2, and a more stable etch rate. [2] Some oxides produce insoluble products in HF solutions.
Benzyltrimethylammonium fluoride is a quaternary ammonium salt. It is commercially available as the hydrate. The compound is a source of organic-soluble fluoride to removal of silyl ether protecting groups. As is the case for tetra-n-butylammonium fluoride and most other quaternary ammonium fluorides, the compound cannot be obtained in ...