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An example of a bio-MEMS device is this automated FISH microchip, which integrates a reagent multiplexer, a cell chamber with a thin-film heater layer, and a peristaltic pump. [1] Bio-MEMS is an abbreviation for biomedical (or biological) microelectromechanical systems.
An early example of a MEMS device is the resonant-gate transistor, an adaptation of the MOSFET, developed by Robert A. Wickstrom for Harvey C. Nathanson in 1965. [4] Another early example is the resonistor, an electromechanical monolithic resonator patented by Raymond J. Wilfinger between 1966 and 1971.
RF MEMS components are biased electrostatically using a bipolar NRZ drive voltage, as shown in Fig. 2, in order to avoid dielectric charging [11] and to increase the lifetime of the device. Dielectric charges exert a permanent electrostatic force on the beam.
The completed MEMS devices, enclosed in small chip-level vacuum chambers, are diced from their silicon wafers, and the resonator die are stacked on CMOS die and molded into plastic packages to form oscillators. MEMS oscillators are packaged in the same factories and with the same equipment and materials that are used for standard IC packaging.
Microoptoelectromechanical systems (MOEMS), also known as optical MEMS, are integrations of mechanical, optical, and electrical systems that involve sensing or manipulating optical signals at a very small size. MOEMS includes a wide variety of devices, for example optical switch, optical cross-connect, tunable VCSEL, microbolometers.
Brain-on-a-chip devices are devices that allow the culturing and manipulation of brain-related tissues through microfabrication and microfluidics by: 1) improving culture viability; 2) supporting high-throughput screening for simple models; 3) modeling tissue or organ-level physiology and disease in vitro/ex vivo, and 4) adding high precision ...
NEMS form the next logical miniaturization step from so-called microelectromechanical systems, or MEMS devices. NEMS typically integrate transistor-like nanoelectronics with mechanical actuators , pumps, or motors, and may thereby form physical, biological, and chemical sensors .
Lab-on-a-chip devices are a subset of microelectromechanical systems (MEMS) devices and sometimes called "micro total analysis systems" (μTAS). LOCs may use microfluidics, the physics, manipulation and study of minute amounts of fluids. However, strictly regarded "lab-on-a-chip" indicates generally the scaling of single or multiple lab ...