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Laurell Technologies WS-400 spin coater used to apply photoresist to the surface of a silicon wafer. Spin coating is a procedure used to deposit uniform thin films onto flat substrates. Usually a small amount of coating material in liquid form is applied on the center of the substrate, which is either spinning at low speed or not spinning at all.
They are important tools for improving the performance of many vacuum systems. Sintered onto the inner surface of high vacuum vessels, the NEG coating can be applied even to spaces that are narrow and hard to pump out, which makes it very popular in particle accelerators where this is an issue. The main sorption parameters of the kind of NEGs ...
A fluid reservoir to store the main supply of coating fluid for the system; A pump to drive the coating fluid through the system; A slot-die to distribute the coating fluid across the desired coating width before coating onto the substrate; A substrate mounting system to support the substrate in a controlled manner as it moves through the system
The sorption pump is a vacuum pump that creates a vacuum by adsorbing molecules on a very porous material like molecular sieve which is cooled by a cryogen, typically liquid nitrogen. The ultimate pressure is about 10 −2 mbar. With special techniques this can be lowered till 10 −7 mbar.
HVAF coating technology is the combustion of propane in a compressed air stream. Like HVOF, this produces a uniform high velocity jet. HVAF differs by including a heat baffle to further stabilize the thermal spray mechanisms. Material is injected into the air-fuel stream and coating particles are propelled toward the part. [4]
A turbomolecular pump is a type of vacuum pump, superficially similar to a turbopump, used to obtain and maintain high vacuum. [ 1 ] [ 2 ] These pumps work on the principle that gas molecules can be given momentum in a desired direction by repeated collision with a moving solid surface.
Single-stage vacuum pumps typically produce vacuum to 35 torr (mm Hg) or 47 millibars (4.7 kPa), and two-stage pumps can produce vacuum to 25 torr, assuming air is being pumped and the ring-liquid is water at 15 °C (59 °F) or less. Dry air and 15 °C sealant-water temperature is the standard performance basis, which most manufacturers use for ...
The term "roughing pump" derives from the vacuum range it works in, "rough vacuum", above 1x10 −3 torr (0.1 Pa). Pumps that operate in the high vacuum ranges typically don't operate, or only operate inefficiently, at atmospheric pressures, whereas pumps that work efficiently at atmospheric pressure usually cannot produce a vacuum lower than ...
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