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Focused ion beam, also known as FIB, is a technique used particularly in the semiconductor industry, materials science and increasingly in the biological field for site-specific analysis, deposition, and ablation of materials. A FIB setup is a scientific instrument that resembles a scanning electron microscope (SEM).
Another method is ion-beam-induced deposition (IBID), where a focused ion beam is applied instead. Precursor materials are typically liquid or solid and gasified prior to deposition, usually through vaporization or sublimation , and introduced, at accurately controlled rate, into the high-vacuum chamber of the electron microscope.
EBIC – Electron beam induced current (see IBIC: ion beam induced charge) EBS – Elastic (non-Rutherford) backscattering spectrometry (see RBS) EBSD – Electron backscatter diffraction; ECOSY – Exclusive correlation spectroscopy; ECT – Electrical capacitance tomography; EDAX – Energy-dispersive analysis of x-rays
A subclass of this is focused ion beam milling, where gallium ions are used to produce an electron transparent membrane or 'lamella' in a specific region of the sample, for example through a device within a microprocessor or a focused ion beam SEM. Ion beam milling may also be used for cross-section polishing prior to analysis of materials that ...
The configuration of the ion beam apparatus can be changed and made more complex with the incorporation of additional components. The techniques for ion beam analysis are designed for specific purposes. Some techniques and ion sources are shown in table 1. Detector types and arrangements for ion beam techniques are shown in table 2.
Carl Zeiss Crossbeam 550 – combines a field emission scanning electron microscope (FE-SEM) with a focused ion beam (FIB). Nanofluidics channels fabricated with a Zeiss Crossbeam 550 L, in a silicon master stamp. Ion beams can be used for material modification (e.g. by sputtering or ion beam etching) and for ion beam analysis.
An electrostatic lens is a device that assists in the transport of charged particles. [1] [2] [3] For instance, it can guide electrons emitted from a sample to an electron analyzer, analogous to the way an optical lens assists in the transport of light in an optical instrument.
A scanning helium ion microscope (SHIM, HeIM or HIM) is an imaging technology based on a scanning helium ion beam. [2] Similar to other focused ion beam techniques, it allows to combine milling and cutting of samples with their observation at sub-nanometer resolution. [3] In terms of imaging, SHIM has several advantages over the traditional ...