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Focused ion beam, also known as FIB, is a technique used particularly in the semiconductor industry, materials science and increasingly in the biological field for site-specific analysis, deposition, and ablation of materials. A FIB setup is a scientific instrument that resembles a scanning electron microscope (SEM).
Beam spots with diameter down to about two micrometres can be obtained by collimating the beam with pinhole apertures or with a drawn capillary. Sub-micrometre beam spot sizes have been achieved by focusing the beam using various combinations of electrostatic or magnetic lenses. Both methods are used at present.
The configuration of the ion beam apparatus can be changed and made more complex with the incorporation of additional components. The techniques for ion beam analysis are designed for specific purposes. Some techniques and ion sources are shown in table 1. Detector types and arrangements for ion beam techniques are shown in table 2.
A magnetic lens is a device for the focusing or deflection of moving charged particles, such as electrons or ions, by use of the magnetic Lorentz force. Its strength can often be varied by usage of electromagnets. Magnetic lenses are used in diverse applications, from cathode ray tubes over electron microscopy to particle accelerators.
Focused ion and electron beam techniques for the fabrication of strong, stable, reproducible Si 3 N 4 pyramidal tips with 1.0 μm length and 0.1 μm diameter were reported by Russell in 1992. [6] Significant advancement also came through the introduction of micro-fabrication methods for the creation of precise conical or pyramidal silicon and ...
Secondary ion mass spectrometry (SIMS) is used to analyze solid surfaces and thin films by sputtering the surface with a focused primary ion beam and collecting and analyzing ejected secondary ions. There are many different sources for a primary ion beam. However, the primary ion beam must contain ions that are at the higher end of the energy ...
A scanning helium ion microscope (SHIM, HeIM or HIM) is an imaging technology based on a scanning helium ion beam. [2] Similar to other focused ion beam techniques, it allows to combine milling and cutting of samples with their observation at sub-nanometer resolution. [3] In terms of imaging, SHIM has several advantages over the traditional ...
An electrostatic lens is a device that assists in the transport of charged particles. [1] [2] [3] For instance, it can guide electrons emitted from a sample to an electron analyzer, analogous to the way an optical lens assists in the transport of light in an optical instrument.