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Compared to 193i SADP, EUV SADP cost is dominated by the EUV tool exposure, while the 193i SAQP cost difference is from the added depositions and etches. The processing cost and yield loss at a lithographic tool is expected to be highest in the whole integrated process flow due to the need to move the wafer to specific locations at high speed.
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SADP may refer to : Science and Technology. Self-Aligned Double-Patterning, a Multiple patterning technique used in semiconductor manufacturing; Selected Area Diffraction Pattern, the pattern of spots in Selected area diffraction; sADP, "slow after depolarizing current", an experimental response of Neurons; Other
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Download and install the latest Java Virtual Machine in Internet Explorer. 1. Go to www.java.com. 2. Click Free Java Download. 3. Click Agree and Start Free Download. 4. Click Run. Notes: If prompted by the User Account Control window, click Yes. If prompted by the Security Warning window, click Run. 5.