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ISO 14644-3: Test Methods [3] ISO 14644-4: Design, Construction, and Start-up [3] ISO 14644-5: Operations [3] ISO 14644-6: Vocabulary [3] ISO 14644-7: Separative devices (clean air hoods, gloveboxes, isolators and minienvironments [3] ISO 14644-8:2022(en), Cleanrooms and associated controlled environments — Part 8: Assessment of air ...
Cleanroom suitability describes the suitability of a machine, operating utility, material, etc. for use in a cleanroom, where air cleanliness and other parameters are controlled by way of technical regulations in accordance with ISO 14644. [1]
A cleanroom or clean room is an engineered space that maintains a very low concentration of airborne particulates. It is well isolated, well controlled from contamination , and actively cleansed. Such rooms are commonly needed for scientific research and in industrial production for all nanoscale processes, such as semiconductor manufacturing.
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ISO 14698-1 was first written in 2003. ISO 14698-1 describes the principles and basic methodology for a formal system to assess and control biocontamination, where cleanroom technology is applied, in order that biocontamination in zones at risk can be monitored in a reproducible way and appropriate control measures can be selected.
Although the clean-room approach had been used as preventative measure in view of possible litigation before (e.g. in the Phoenix BIOS case), the NEC v. Intel case was the first time that the clean-room argument was accepted in a US court trial. A related aspect worth mentioning here is that NEC did have a license for Intel's patents governing ...
HEPA filtration within the air shower is capable of removing 99.97% of particles greater than 0.3 μm diameter. [5] Air is channeled within the air shower using a closed-loop system, where it is continuously re-circulated. Air is forced through a motorized filter/blower module into a large plenum, then into the shower through jet nozzles.