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A SÜSS MicroTec MA6 mask aligner. An aligner, or mask aligner, is a system that produces integrated circuits (IC) using the photolithography process. It holds the photomask over the silicon wafer while a bright light is shone through the mask and onto the photoresist. The "alignment" refers to the ability to place the mask over precisely the ...
The Perkin-Elmer Micralign was a family of aligners introduced in 1973. Micralign was the first projection aligner, a concept that dramatically improved semiconductor fabrication. According to the Chip History Center, it "literally made the modern IC industry". [1]
Aligners imaged the entire surface of a wafer at the same time, producing many chips in a single operation. In contrast, the stepper imaged only one chip at a time, and was thus much slower to operate. The stepper eventually displaced the aligner when the relentless forces of Moore's Law demanded that smaller feature sizes be used. Because the ...
Photolithography is the most common method for the semiconductor fabrication of integrated circuits ("ICs" or "chips"), such as solid-state memories and microprocessors. It can create extremely small patterns, down to a few nanometers in size. It provides precise control of the shape and size of the objects it creates.
Aligner (semiconductor), a system used to project photomasks in photolithography. Topics referred to by the same term This disambiguation page lists articles associated with the title Mask aligner .
The first mask aligner, which enabled double-sided exposure, was invented in 1974. Suss MicroTec, whose name already stood for photolithography in the research and development sector, now also focused on customers from the manufacturing industry. In 1975, the first mask aligner for mass production was developed, the MJB55. [3]
MUNICH (Reuters) -The CEOs of Europe's three biggest computer chip makers on Monday said that demands by the U.S., Chinese and European governments that each region have its own semiconductor ...
Producing a diffraction-free image was ultimately solved through the projection aligner systems, which dominated chip making through the 1970s and early 1980s. The relentless drive of Moore's law ultimately reached the limit of what the projection aligners could handle. Efforts were made to extend their lifetimes by moving to ever-higher UV ...
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