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Microforming is a microfabrication process of microsystem or microelectromechanical system (MEMS) "parts or structures with at least two dimensions in the submillimeter range." [3] [4] [5] It includes techniques such as microextrusion, [4] microstamping, [6] and microcutting. [7]
The prior art includes an RF MEMS frequency tunable fractal antenna for the 0.1–6 GHz frequency range, [18] and the actual integration of RF MEMS switches on a self-similar Sierpinski gasket antenna to increase its number of resonant frequencies, extending its range to 8 GHz, 14 GHz and 25 GHz, [19] [20] an RF MEMS radiation pattern ...
In 1993, Dr. Motamedi officially introduced MOEMS for the first time, as the powerful combination of MEMS and micro-optics, in an invited talk at the SPIE Critical Reviews of Optical Science and Technology conference in San Diego. In this talk Dr. Motamedi introduced the figure below, for showing that MOEMS is the interaction of three major ...
MEMS clock generators are useful in complex systems that require multiple frequencies, such as data servers and telecom switches. MEMS real-time clocks are used in systems that require precise time measurements. Smart meters for gas and electricity are an example that is consuming significant quantities of these devices.
Interest in piezoMEMS technology began around the early 1990s as scientists explored alternatives to electrostatic actuation in radio frequency (RF) microelectromechanical systems (MEMS). [2] For RF MEMS, electrostatic actuation specialized high voltage charge pump circuits due to small electrode gap spacing and large driving voltages.
A MEMS magnetic actuator is a device that uses the microelectromechanical systems (MEMS) to convert an electric current into a mechanical output by employing the well-known Lorentz Force Equation or the theory of Magnetism.
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