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Chemical vapor deposition (CVD) is a vacuum deposition method used to produce high-quality, and high-performance, solid materials. The process is often used in the semiconductor industry to produce thin films .
This low-pressure process is known as chemical vapor deposition (CVD). William G. Eversole reportedly achieved vapor deposition of diamond over diamond substrate in 1953, but it was not reported until 1962. [41] [42] Diamond film deposition was independently reproduced by Angus and coworkers in 1968 [43] and by Deryagin and Fedoseev in 1970.
Synthetic diamonds are produced via high pressure, high temperature or chemical vapor deposition (CVD) technology. These diamonds have numerous industrial and commercial uses including cutting tools, thermal conductors and consumer diamond gemstones.
In synthetic diamond grown by the high-pressure high-temperature synthesis [5] or chemical vapor deposition, [6] [7] defects with symmetry lower than tetrahedral align to the direction of the growth. Such alignment has also been observed in gallium arsenide [ 8 ] and thus is not unique to diamond.
N-type diamond films are reproducibly synthesized by phosphorus doping during chemical vapor deposition. [35] Diode p-n junctions and UV light emitting diodes (LEDs, at 235 nm) have been produced by sequential deposition of p-type (boron-doped) and n-type (phosphorus-doped) layers. [36]
Substantial conductivity is commonly observed in nominally undoped diamond grown by chemical vapor deposition. This conductivity is associated with hydrogen-related species adsorbed at the surface, and it can be removed by annealing or other surface treatments. [42] [43]
Moreover, nanodiamond can be exploited as sensor for some specific analytes. Boron-doped diamond (BDD) produced by energy-assisted (plasma or hot filament, HF) Chemical Vapor Deposition (CVD) processes is a good candidatein Dopamine detection, however it is not selective towards some interferents.
Chemical vapor deposition (CVD) is used to synthesize Si-V centers via a similar process to that used to produce N-V centers [20].. In the case of Si-V centers, there are two main types of CVD used. First, when a solid containing Silicon is etched with hydrogen, and SiH x radicals dope the diamond lattice. [21]