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deployment of high-NA (0.55) EUV tools with the first $400 million tool to be completed at ASML in 2023, and the first production tool was shipped to and installed at Intel in 2024; [51] further reduction of standard cell height (eventually to "less than 4" tracks); back-side power distribution, buried power rails;
ASML has orders for more than a dozen, though TSMC, its biggest customer for EUV equipment, has said it does not need to use High NA tools for its A16 chips, expected to enter production in 2025 ...
Meanwhile, Intel is looking to use high-NA EUV technology in production in 2027. It will be interesting to see if TSMC is willing to give Intel such a big head start in using high-NA EUV ...
ASML is working on the next generation of EUV systems, with the first shipments for R&D purposes shipped to Intel in December 2023, and TSMC in late 2024. [19] [20] The platform is designated High-NA as it increases the numerical aperture (NA) from 0.33 to 0.55, [17] and each system costs approximately $370 million. [2] [20]
Beyond high-NA, ASML in 2024 announced plans for the development of a hyper-NA EUV tool with an NA beyond 0.55, such as an NA of 0.75 or 0.85. [331] [332] These machines could cost USD 720 million each and are expected to be available in 2030. [33] A problem with Hyper-NA is polarization of the EUV light causing a reduction in image contrast ...
ASML has reached "first light" on its massive new High NA EUV lithography system, the Dutch semiconductor equipment maker confirmed on Wednesday, a milestone that means the tool is functioning ...
At the 2016 EUVL Workshop, ASML reported that the 0.33 NA NXE EUV tools would not be capable of standard single exposure patterning for the 11-13 nm half-pitch expected at the 5 nm node. [96] A higher NA of 0.55 would allow single exposure EUV patterning of fields which are half the 26 mm x 33 mm standard field size. [96]
The High NA machines, which when assembled will be larger than a truck, are being shipped in 250 separate crates, including 13 large containers. They are expected to be used in commercial chip ...