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During 1991-1993, Dr. M. Edward Motamedi, a former Rockwell International innovator in the areas of both microelectromechanical systems and micro-optics, used internally the acronym of MOEMS for microoptoelectromechanical systems. This was to distinguish between optical MEMS and MOEMS, where optical MEMS could include bulk optics but MOEMS is ...
The global market for micro-electromechanical systems, which includes products such as automobile airbag systems, display systems and inkjet cartridges totaled $40 billion in 2006 according to Global MEMS/Microsystems Markets and Opportunities, a research report from SEMI and Yole Development and is forecasted to reach $72 billion by 2011. [39]
A piezoelectric microelectromechanical system (piezoMEMS) is a miniature or microscopic device that uses piezoelectricity to generate motion and carry out its tasks. It is a microelectromechanical system that takes advantage of an electrical potential that appears under mechanical stress .
A radio-frequency microelectromechanical system (RF MEMS) is a microelectromechanical system with electronic components comprising moving sub-millimeter-sized parts that provide radio-frequency (RF) functionality. [1] RF functionality can be implemented using a variety of RF technologies.
The Journal of Micromechanics and Microengineering is a peer-reviewed scientific journal that covers all aspects of microelectromechanical systems, devices and structures, as well as micromechanics, microengineering, and microfabrication. The editor-in-chief is Weileun Fang (National Tsing Hua University).
Bio-MEMS is an abbreviation for biomedical (or biological) microelectromechanical systems. Bio-MEMS have considerable overlap, and is sometimes considered synonymous, with lab-on-a-chip (LOC) and micro total analysis systems (μTAS) .
NEM relays are usually fabricated using surface micromachining techniques typical of microelectromechanical systems (MEMS). [4] Laterally actuated relays are constructed by first depositing two or more layers of material on a silicon wafer. The upper structural layer is photolithographically patterned in order to form isolated blocks of the ...
Microoptomechanical systems (MOMS), also written as micro-optomechanical systems, are a special class of microelectromechanical systems (MEMS) which use optical and mechanical, but not electronic components.