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After ANSI and IEST petitioned to ISO for new standards, the first document of ISO 14644 was published in 1999, ISO 14644-1. [1] In 2000, ISO 14644-2 was published, which began the process of FED-STD-209E being canceled. On November 29, 2001, the document was canceled and superseded by ISO 14644-1 and ISO 14644-2. [2] ISO 14644 is now composed of
An exception to this is when determining the suitability of a test piece for use in Class 1 cleanrooms in accordance with DIN EN ISO 14644-1: such tests have to be carried out in a Class 1 cleanroom because no other cleanroom classes are defined which are better than this.
ISO/TS 14837-32:2015 Part 32: Measurement of dynamic properties of the ground; ISO 14839 Mechanical vibration - Vibration of rotating machinery equipped with active magnetic bearings ISO 14839-1:2002 Part 1: Vocabulary; ISO 14839-2:2004 Part 2: Evaluation of vibration; ISO 14839-3:2006 Part 3: Evaluation of stability margin
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Small numbers refer to ISO 14644-1 standards, which specify the decimal logarithm of the number of particles 0.1 μm or larger permitted per m 3 of air. So, for example, an ISO class 5 cleanroom has at most 10 5 particles/m 3. Both FS 209E and ISO 14644-1 assume log-log relationships between particle size and particle concentration.
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ISO 10110-10:2004 Part 10: Table representing data of optical elements and cemented assemblies; ISO 10110-11:2016 Part 11: Non-toleranced data; ISO 10110-12:2007 Part 12: Aspheric surfaces; ISO 10110-14:2007 Part 14: Wavefront deformation tolerance; ISO 10110-17:2004 Part 17: Laser irradiation damage threshold
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