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Electropolishing, also known as electrochemical polishing, anodic polishing, or electrolytic polishing (especially in the metallography field), is an electrochemical process that removes material from a metallic workpiece, reducing the surface roughness by levelling micro-peaks and valleys, improving the surface finish.
The pad and wafer are pressed together by a dynamic polishing head and held in place by a plastic retaining ring. The dynamic polishing head is rotated with different axes of rotation (i.e., not concentric). This removes material and tends to even out any irregular topography, making the wafer flat or planar. This may be necessary to set up the ...
The condition of the material at hand determines what type of abrasive will be applied. The first stage, if the material is unfinished, starts with a rough abrasive (perhaps 60 or 80 grit) and each subsequent stage uses a finer abrasive, such as 120, 180, 220/240, 320, 400 and higher grit abrasives, until the desired finish is achieved.
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Polishing is the process of creating a smooth and shiny surface by rubbing it or by applying a chemical treatment, leaving a clean surface with a significant specular reflection (still limited by the index of refraction of the material according to the Fresnel equations). [1]
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