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An industrial furnace, also known as a direct heater or a direct fired heater, is a device used to provide heat for an industrial process, typically higher than 400 degrees Celsius. [1] They are used to provide heat for a process or can serve as reactor which provides heats of reaction.
Furnaces are mostly used as a major component of a central heating system. Furnaces are permanently installed to provide heat to an interior space through intermediary fluid movement, which may be air, steam, or hot water. Heating appliances that use steam or hot water as the fluid are normally referred to as a residential steam boilers or ...
Vertical furnaces solve this problem by having wafer sitting horizontally, and then having the gas flow in the furnace flowing from top to bottom, significantly damping any thermal convections. Vertical furnaces also allow the use of load locks to purge the wafers with nitrogen before oxidation to limit the growth of native oxide on the Si surface.
A horizontal cylinder in form, with a cylindrical furnace and multiple fire-tubes. They have some resemblance to a small Scotch boiler or Huber boiler, but with the fire-tubes extending beyond the furnace end, rather than folded back as a return-tube boiler. [35] Sometimes small return-tube boilers of just this form are also described as ...
Furnace (central heating): a furnace, or a heater or boiler, used to generate heat for buildings; Boiler, used to heat water; also called a furnace in American English when used for heating and hot water in a building; Jetstream furnace or Tempest boiler, a design of wood-fired water heater
A cyclone furnace consists of a horizontal cylindrical barrel attached through the side of a boiler furnace. The cyclone barrel is constructed with water cooled, tangential oriented, tube construction. Inside the cyclone barrel are short, densely spaced, pin studs welded to the outside of the tubes.
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