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These materials have semiconductor, [12] electrochromic, [15] and optical [10] applications. Tantalum(V) oxide films have a variety of applications including as optical films with refractive indices as high as 2.039 [ 16 ] and as a thin-film dielectric material in dynamic random access memory and semiconductor field-effect transistors . [ 12 ]
Tantalum ores often contain significant amounts of niobium, which is itself a valuable metal.As such, both metals are extracted so that they may be sold. The overall process is one of hydrometallurgy and begins with a leaching step; in which the ore is treated with hydrofluoric acid and sulfuric acid to produce water-soluble hydrogen fluorides, such as the heptafluorotantalate.
A productive overview is provided by several exceptional reviews covering fields of MOCVD such as, for instance, epitaxial growth of semiconductor compounds, [2] [3] [4] and low temperature deposition of metals. [5] [6] An overview of metal-organic compounds used for the MOCVD growth of different kind of materials is reported in the following ...
In the metal organic chemical vapor deposition (MOCVD) technique, reactant gases are combined at elevated temperatures in the reactor to cause a chemical interaction, resulting in the deposition of materials on the substrate. A reactor is a chamber made of a material that does not react with the chemicals being used.
Physical vapor deposition (PVD), sometimes called physical vapor transport (PVT), describes a variety of vacuum deposition methods which can be used to produce thin films and coatings on substrates including metals, ceramics, glass, and polymers. PVD is characterized by a process in which the material transitions from a condensed phase to a ...
Copper metal ALD has attracted much attention due to the demand for copper as an interconnect material [citation needed] and the relative ease by which copper can be deposited thermally. [27] Copper has a positive standard electrochemical potential [ 28 ] and is the most easily reduced metal of the first-row transition metals.
Deposition is the phase transition in which gas transforms into solid without passing through the liquid phase. Deposition is a thermodynamic process . The reverse of deposition is sublimation and hence sometimes deposition is called desublimation .
The PVD process can be carried out at lower deposition temperatures and without corrosive products, but deposition rates are typically lower. Electron-beam physical vapor deposition, however, yields a high deposition rate from 0.1 to 100 μm/min at relatively low substrate temperatures, with very high material utilization efficiency. The ...