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The term "MEMS" was introduced in 1986. S.C. Jacobsen (PI) and J.E. Wood (Co-PI) introduced the term "MEMS" by way of a proposal to DARPA (15 July 1986), titled "Micro Electro-Mechanical Systems (MEMS)", granted to the University of Utah. The term "MEMS" was presented by way of an invited talk by S.C. Jacobsen, titled "Micro Electro-Mechanical ...
MEMS clock generators are MEMS timing devices with multiple outputs for systems that need more than a single reference frequency. MEMS oscillators are a valid alternative to older, more established quartz crystal oscillators, offering better resilience against vibration and mechanical shock, and reliability with respect to temperature variation.
A capacitive fixed-fixed beam RF MEMS switch, as shown in Fig. 1(a), is in essence a micro-machined capacitor with a moving top electrode, which is the beam. It is generally connected in shunt with the transmission line and used in X- to W-band (77 GHz and 94 GHz) RF MEMS components. An ohmic cantilever RF MEMS switch, as shown in Fig. 1(b), is ...
During 1991-1993, Dr. M. Edward Motamedi, a former Rockwell International innovator in the areas of both microelectromechanical systems and micro-optics, used internally the acronym of MOEMS for microoptoelectromechanical systems. This was to distinguish between optical MEMS and MOEMS, where optical MEMS could include bulk optics but MOEMS is ...
Nanoelectromechanical systems (NEMS) are a class of devices integrating electrical and mechanical functionality on the nanoscale. NEMS form the next logical miniaturization step from so-called microelectromechanical systems , or MEMS devices.
Micro-Electro-Mechanical System (MEMS) technology [1] is a process technology in which mechanical and electro-mechanical devices or structures are constructed using special micro-fabrication techniques. These techniques include: bulk micro-machining, surface micro-machining, LIGA, wafer bonding, etc. MEMS scale of dimensions
A piezoelectric microelectromechanical system (piezoMEMS) is a miniature or microscopic device that uses piezoelectricity to generate motion and carry out its tasks. It is a microelectromechanical system that takes advantage of an electrical potential that appears under mechanical stress .
The first MEMS device.. Harvey C. Nathanson (October 22, 1936 – November 22, 2019) was an American electrical engineer who, with engineer Robert A. Wickstrom, invented the first MEMS (micro-electro-mechanical systems) device of the type now found in products ranging from iPhones to automobiles.