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The Roots blower is one example of a vacuum pump. A vacuum pump is a type of pump device that draws gas particles from a sealed volume in order to leave behind a partial vacuum. The first vacuum pump was invented in 1650 by Otto von Guericke, and was preceded by the suction pump, which dates to antiquity. [1]
A turbomolecular pump is a type of vacuum pump, superficially similar to a turbopump, used to obtain and maintain high vacuum. [ 1 ] [ 2 ] These pumps work on the principle that gas molecules can be given momentum in a desired direction by repeated collision with a moving solid surface.
Single-stage vacuum pumps typically produce vacuum to 35 torr (mm Hg) or 47 millibars (4.7 kPa), and two-stage pumps can produce vacuum to 25 torr, assuming air is being pumped and the ring-liquid is water at 15 °C (59 °F) or less. Dry air and 15 °C sealant-water temperature is the standard performance basis, which most manufacturers use for ...
Alcatel Vacuum Technology, AMMS' original parent company, had a long-running business in plasma processing. Its first equipment based on an Alcatel patented Inductive Coupled Plasma (ICP) source, with independent source power and substrate bias control for deep etching of silicon, was launched in 1993. AMMS was created as a subsidiary in 2006 ...
A vacuum ejector, or simply ejector, or aspirator, is a type of vacuum pump, which produces vacuum by means of the Venturi effect.. In an ejector, a working fluid (liquid or gaseous) flows through a jet nozzle into a tube that first narrows and then expands in cross-sectional area.
An oil diffusion pump is used to achieve higher vacuum (lower pressure) than is possible by use of positive displacement pumps alone. Although its use has been mainly associated within the high-vacuum range, down to 1 × 10 −9 mbar (1 × 10 −7 Pa), diffusion pumps today can produce pressures approaching 1 × 10 −10 mbar (1 × 10 −8 Pa) when properly used with modern fluids and accessories.
Pfeiffer Vacuum Technology AG is a German manufacturer of vacuum pumps. [1] It is headquartered in Aßlar in Germany with 70% of the total production catering to the export market. In July 1996 the company was listed on the NYSE and in April 1998 on the TecDAX. Due to low trading volumes, it was de-listed from the NYSE in October 2007. [2]
The term "roughing pump" derives from the vacuum range it works in, "rough vacuum", above 1x10 −3 torr (0.1 Pa). Pumps that operate in the high vacuum ranges typically don't operate, or only operate inefficiently, at atmospheric pressures, whereas pumps that work efficiently at atmospheric pressure usually cannot produce a vacuum lower than ...