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Chemical vapor deposition (CVD) is a vacuum deposition method used to produce high-quality, and high-performance, solid materials. The process is often used in the semiconductor industry to produce thin films .
In synthetic diamond grown by the high-pressure high-temperature synthesis [5] or chemical vapor deposition, [6] [7] defects with symmetry lower than tetrahedral align to the direction of the growth. Such alignment has also been observed in gallium arsenide [ 8 ] and thus is not unique to diamond.
This low-pressure process is known as chemical vapor deposition (CVD). William G. Eversole reportedly achieved vapor deposition of diamond over diamond substrate in 1953, but it was not reported until 1962. [41] [42] Diamond film deposition was independently reproduced by Angus and coworkers in 1968 [43] and by Deryagin and Fedoseev in 1970.
N-type diamond films are reproducibly synthesized by phosphorus doping during chemical vapor deposition. [35] Diode p-n junctions and UV light emitting diodes (LEDs, at 235 nm) have been produced by sequential deposition of p-type (boron-doped) and n-type (phosphorus-doped) layers. [36]
Moreover, nanodiamond can be exploited as sensor for some specific analytes. Boron-doped diamond (BDD) produced by energy-assisted (plasma or hot filament, HF) Chemical Vapor Deposition (CVD) processes is a good candidatein Dopamine detection, however it is not selective towards some interferents.
In chemistry, a precursor is a compound that contributes in a chemical reaction and produces another compound, or a chemical substance that gives rise to another more significant chemical product. Since several years metal-organic compounds are widely used as molecular precursors for the chemical vapor deposition process (MOCVD).
When the vapor source is a liquid or solid, the process is called physical vapor deposition (PVD), [3] which is used in semiconductor devices, thin-film solar panels, and glass coatings. [4] When the source is a chemical vapor precursor, the process is called chemical vapor deposition (CVD).
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